Electron Beam Lithography Systems

SEM EBL (Scanning Electron Microscope Electron Beam Lithography) is an advanced EBL system built by modifying a high-resolution SEM. It enables precise nanoscale patterning at a fraction of the cost of traditional systems. Since 1975, we have driven innovation in fabrication, measurement, and analysis worldwide.

400+

Installations

1975

Established

10+

Countries

Electron Beam Lithography Products

SEM-EBL Research Series

SEM-EBL Research Series

SEM-EBL Pro Series

SEM-EBL Pro Series

SEM-EBL ORCA

SEM-EBL ORCA

Global Reach

SEM EBL Technologies is a premier partnership dedicated to delivering state-of-the-art nanotechnology products across North America, Europe, and Asia.

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Who We Serve

National Laboratories

Research Universities

Industry

Applications

News & Blog

Nonlinear metasurfaces

Nonlinear Metasurfaces with SEM-EBL

Our SEM-EBL system enables precise fabrication of nonlinear metasurfaces, achieving unprecedented control over light-matter interactions at the subwavelength scale.

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May 14, 2026
Field-of-View Metasurface

Nearly 180° Field-of-View Metasurface

Researchers utilized our high-accuracy EBL to create ultra-wide field-of-view imaging systems with applications in consumer electronics and medical devices.

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March 10, 2026
Suspended 4H-Silicon Carbide

Suspended 4H-Silicon Carbide Platform

SEM-EBL facilitates the manufacturing of suspended 4H-SiC membranes, a key material for next-generation solid-state quantum technologies and wide-bandgap semiconductors.

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February 5, 2026

SEM-EBL 100

Entry-level research system with sub-20nm resolution, ideal for university labs.

SEM-EBL 300

Advanced system featuring high-speed writing and auto-alignment for complex nanostructures.

SEM-EBL 500

Sub-5nm lithography system specifically designed for quantum computing research.

SEM-EBL Pro 2000

High volume manufacturing solution with automated wafer handling and fast patterning.

SEM-EBL Pro 5000

Flagship production system featuring multi-beam capability for 300mm wafers.

SEM-EBL Pro 8000

Ultimate precision tool for advanced semiconductor packaging and 3D integration.

24/7 Customer Service

Reach our support team anytime, anywhere.

+1 (555) 123-4567

Remote Diagnostics

Quickly resolve issues using our advanced remote diagnostic tools.

On-Site Maintenance

Our certified engineers provide scheduled maintenance and emergency repairs.

Email Support

SEM-EBL Deployed at MIT

The Massachusetts Institute of Technology has installed our newest SEM-EBL 500 to advance their Quantum Engineering research.

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June 10, 2026

Breakthrough in Maskless Lithography

Our latest software update allows for 10x faster writing times, significantly reducing production costs without sacrificing resolution.

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April 22, 2026

Upcoming Webinar: Advanced EBL

Join us on August 15th for a comprehensive webinar on using SEM-EBL for integrated photonics and metasurface fabrication.

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March 30, 2026

SEM EBL Technologies Inc. was established to bridge the gap between high-resolution Scanning Electron Microscopy and precision Electron Beam Lithography. By integrating these two technologies, we provide cost-effective, highly accurate nanoscale patterning solutions to world-class institutions and industries.


Our Mission

To make advanced nanotechnology accessible to researchers and manufacturers globally through innovation, reliability, and exceptional support.


Our Team

Under the leadership of CEO Dr. Alan Wakefield, our team of experienced engineers and scientists continues to push the boundaries of electron beam technology.


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